Low temperature fabrication of immersion capacitive...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2004 / 10 Vol. 51; Iss. 10

Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates

Knight, J., McLean, J., Degertekin, F.L.
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Volume:
51
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2004.1350961
Date:
October, 2004
File:
PDF, 1.69 MB
english, 2004
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