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SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2004 - San Jose, CA (Monday 26 January 2004)] Quantum Sensing and Nanophotonic Devices - Plasma etching of ZnO: a review
Nordheden, Karen J., Razeghi, Manijeh, Brown, Gail J.Volume:
5359
Year:
2004
Language:
english
DOI:
10.1117/12.531391
File:
PDF, 47 KB
english, 2004