Influence of the temporal shape of femtosecond pulses on silicon micromachining
Gunaratne, Tissa C., Zhu, Xin, Lozovoy, Vadim V., Dantus, MarcosVolume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3253330
File:
PDF, 640 KB
english, 2009