Collection of Liquid Phase Particles by Microfabricated Electrostatic Precipitator
Chua, Beelee, Wexler, Anthony S., Tien, Norman C., Niemeier, Debbie A., Holmen, Britt A.Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2262597
Date:
October, 2013
File:
PDF, 5.94 MB
english, 2013