![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Tomography using multiple wavelengths in digital holography: method, simulations, and experiments
Montfort, Frédéric, Charrière, Florian, Colomb, Tristan, Kuehn, Jonas, Cuche, Etienne, Depeursinge, Christian, Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangVolume:
6188
Year:
2006
Language:
english
DOI:
10.1117/12.663253
File:
PDF, 729 KB
english, 2006