SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy
Dziomba, Thorsten, Koenders, Ludger, Wilkening, Günter, Duparré, Angela, Geyl, Roland, Wang, LingliVolume:
5965
Year:
2005
Language:
english
DOI:
10.1117/12.626018
File:
PDF, 587 KB
english, 2005