SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Advantages of p++ polysilicon etch stop layer versus p++ silicon
Charavel, Remy, Laconte, Jean, Raskin, Jean Pierre, Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.498107
File:
PDF, 1.01 MB
english, 2003