SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Advances in Resist Technology and Processing XIX - 100-nm generation contact patterning by low temperature 193-nm resist reflow process
Van Driessche, Veerle, Lucas, Kevin, Van Roey, Frieda, Grozev, Grozdan, Tzviatkov, Plamen, Fedynyshyn, Theodore H.Volume:
4690
Year:
2002
Language:
english
DOI:
10.1117/12.474204
File:
PDF, 552 KB
english, 2002