SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12...

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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Optical vortex metrology: Are phase singularities foes or friends in optical metrology?

Takeda, Mitsuo, Wang, Wei, Hanson, Steen G., Miyamoto, Yoko, Kujawinska, Malgorzata, Angelsky, Oleg V.
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Year:
2012
Language:
english
DOI:
10.1117/12.797345
File:
PDF, 567 KB
english, 2012
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