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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Silicon carbide-aluminum nitride: new high-stability composition for MEMS
Luchinin, Victor V., Korlyakov, Andrey V., Vasil'ev, Alexander A., Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341273
File:
PDF, 944 KB
english, 1999