Microstructure and nanomechanical properties of Fe+...

Applied Surface Science 2013 / 11 Vol. 284

Microstructure and nanomechanical properties of Fe+ implanted silicon

Nunes, B., Magalhães, S., Franco, N., Alves, E., Colaço, R.
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Volume:
284
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.07.129
Date:
November, 2013
File:
PDF, 1.59 MB
english, 2013
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