Laser produced streams of Ge ions accelerated and optimized...

Review of Scientific Instruments 2012 Vol. 83; Iss. 2

Laser produced streams of Ge ions accelerated and optimized in the electric fields for implantation into SiO2 substrates

Rosinski, M., Giuffrida, L., Parys, P., Gasior, P., Fazio, E., Mezzasalma, A. M., Torrisi, L., Ando, L., Wolowski, J.
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Volume:
83
Year:
2012
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3660819
File:
PDF, 1.07 MB
english, 2012
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