Characterization of Microporous Silicon Fabricated by...

MRS Proceedings 1991 / 1 Vol. 256

Characterization of Microporous Silicon Fabricated by Immersion Scanning

Bassous, E., Freeman, M., Halbout, J.-M., lyer, S. S., Kesan, V. P., Munguia, P., Pesarcik, S. F., Williams, B. L.

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Volume:

256

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-256-23

Date:

January, 1991

File:

PDF, 214 KB

english, 1991

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