Fabrication of gap-optimized CMUT

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2002 / 09 Vol. 49; Iss. 9

Fabrication of gap-optimized CMUT

Ahrens, O., Buhrdorf, A., Hohlfeld, D., Tebje, L., Binder, J.
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Volume:
49
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2002.1041549
Date:
September, 2002
File:
PDF, 773 KB
english, 2002
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