New Liquid Precursors for the Metal-organic CVD of Gold...

Chemical Vapor Deposition 2013 / 03 Vol. 19; Iss. 1-3

New Liquid Precursors for the Metal-organic CVD of Gold Films

Parkhomenko, Roman G., Turgambaeva, Asiya E., Morozova, Natalia B., Trubin, Sergey V., Krisyuk, Vladislav V., Igumenov, Igor K.
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Volume:
19
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201207022
Date:
March, 2013
File:
PDF, 502 KB
english, 2013
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