Deposition of Cerium Dioxide Thin Films on Silicon...

MRS Proceedings 1993 / 1 Vol. 335

Deposition of Cerium Dioxide Thin Films on Silicon Substrates by Atomic Layer Epitaxy

Mölsä, Heini, Niinistö, Lauri
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Volume:
335
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-335-341
Date:
January, 1993
File:
PDF, 555 KB
english, 1993
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