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160 GHz Gaussian beam microwave interferometry in low-density rf plasmas
Dittmann, K, Küllig, C, Meichsner, JVolume:
21
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/21/2/024001
Date:
April, 2012
File:
PDF, 394 KB
english, 2012