Tribologische Sub-Mikrometer Schichten für Mikrosysteme....

Vakuum in Forschung und Praxis 2002 Vol. 14; Iss. 2

Tribologische Sub-Mikrometer Schichten für Mikrosysteme. Tribological sub-micron coatings for microsystems

Ralf Bandorf, Holger Lüthje
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Volume:
14
Year:
2002
Language:
german
DOI:
10.1002/1522-2454(200204)14:23.0.co;2-t
File:
PDF, 434 KB
german, 2002
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