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Tabletop storage ring MIRRORCLE extreme ultraviolet lithography source
Yamada, Hironari, Minkov, Dorian, Hayashi, Taichi, Hasegawa, DaisukeVolume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.021121
Date:
May, 2012
File:
PDF, 2.04 MB
english, 2012