Vertical and Smooth, etching of InP by Cl 2 /CH 4 /Ar Inductively Coupled Plasma at Room Temperature
Chang-Zheng, Sun, Jin-Bo, Zhou, Bing, Xiong, Jian, Wang, Yi, LuoVolume:
20
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/20/8/338
Date:
August, 2003
File:
PDF, 227 KB
english, 2003