Thermal Stress Induced Thin Film Transfer from...

Integrated Ferroelectrics 2013 / 01 Vol. 144; Iss. 1

Thermal Stress Induced Thin Film Transfer from Single-crystal Silicon Layer on Sapphire Substrate

Lo, F. S., Hsu, R. Y., Ho, C. -C., Li, C., Lee, T. -H.
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Volume:
144
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2013.787273
Date:
January, 2013
File:
PDF, 505 KB
english, 2013
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