[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - On-chip integrated PS3 (Packaging-Stress Suppressed Suspension) for thermal-stress fress package of pressure sensors

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