[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Enhancement of mechanical Q for low phase noise optomechanical oscillators
Rocheleau, Tristan O., Grine, Alejandro J., Grutter, Karen E., Schneider, Robert A., Quack, Niels, Wu, Ming C., Nguyen, Clark T.-C.Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474191
File:
PDF, 2.84 MB
english, 2013