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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectrically transduced high-Q silica micro resonators
Wu, Zhengzheng, Peczalski, Adam, Thakar, Vikram A., Cao, Zongliang, Yuan, Yi, He, Guohong, Peterson, Rebecca L., Najafi, Khalil, Rais-Zadeh, MinaYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474192
File:
PDF, 432 KB
english, 2013