SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Mechanical-thermal simulation of surface-micromachined polysilicon hot plates
Dumitrescu, Mihail M., Cobianu, Corbel, Dascalu, Dan C., Pascu, Adrian, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341221
File:
PDF, 2.25 MB
english, 1999