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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Single-layer “domino” diodes via optofluidic lithography for ultra-low Reynolds number applications
Sochol, Ryan D., Glick, Casey C., Lee, Kye Y., Brubaker, Thomas, Lu, Albert, Wah, Melissa, Gao, Shan, Hicks, Erica, Wolf, Ki Tae, Iwai, Kosuke, Lee, Luke P., Lin, LiweiYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474200
File:
PDF, 616 KB
english, 2013