[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - High kt2×Q, multi-frequency lithium niobate resonators
Wang, Renyuan, Bhave, Sunil A., Bhattacharjee, KushalYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474203
File:
PDF, 1.92 MB
english, 2013