[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Vertical continuous flow lithography for fabricating long 3D structures
Habasaki, S., Yoshida, S., Lee, W. C., Takeuch, S.Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474255
File:
PDF, 644 KB
english, 2013