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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Topology optimization method using multistep mapping from 2D photomask to 3D MEMS
Ozaki, Takashi, Nomura, Tsuyoshi, Fujitsuka, Norio, Shimaoka, Keiichi, Akashi, TeruhisaYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474264
File:
PDF, 459 KB
english, 2013