[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy
Kim, Joohyun, Han, Sunwoo, Park, Keunhan, Lee, Bong-Jae, King, William P., Lee, JungchulYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474265
File:
PDF, 993 KB
english, 2013