[IEEE 2009 International Conference on Mechatronics and Automation (ICMA) - Changchun, China (2009.08.9-2009.08.12)] 2009 International Conference on Mechatronics and Automation - Effects of fabrication error on the pull-in voltage of capacitive micro accelerometer
Wu Zhou,, Bailin Li,, Xiaoping He,, Wei Su,, Fengtian Zhang,Year:
2009
Language:
english
DOI:
10.1109/ICMA.2009.5246723
File:
PDF, 4.47 MB
english, 2009