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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Direct tensile testing of sub-100nm-size silicon nanowires fabricated by fib-sampling of SON membranes
Fujii, T., Sudoh, K., Inoue, S., Namazu, T.Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474285
File:
PDF, 792 KB
english, 2013