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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions
He, Tina, Yang, Rui, Rajgopal, Srihari, Tupta, Mary Anne, Bhunia, Swarup, Mehregany, Mehran, Feng, Philip X.-L.Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474292
File:
PDF, 4.03 MB
english, 2013