[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Parametrically driven resonant micro-mirror scanner with tunable springs
Kim, Jinhyeok, Kawai, Yusuke, Inomata, Naoki, Ono, TakahitoYear:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474308
File:
PDF, 1.77 MB
english, 2013