Hydrogen Plasma Treatment of Silicon Dioxide for Improved...

Langmuir 2013 / 03 Vol. 29; Iss. 11

Hydrogen Plasma Treatment of Silicon Dioxide for Improved Silane Deposition

Gupta, Vipul, Madaan, Nitesh, Jensen, David S., Kunzler, Shawn C., Linford, Matthew R.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
29
Language:
english
Journal:
Langmuir
DOI:
10.1021/la304491x
Date:
March, 2013
File:
PDF, 940 KB
english, 2013
Conversion to is in progress
Conversion to is failed