[IEEE 2013 IEEE 26th International Conference on Micro...

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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Optical accelerometer with mechanical amplification via a V-beam mechanism

Davies, Edward, George, David S., Gower, Malcolm C., Holmes, Andrew S.
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Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474315
File:
PDF, 1.18 MB
english, 2013
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