[IEEE 2013 IEEE 26th International Conference on Micro...

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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsge, Valery V., Senesky, Debbie G., Pisano, Albert P.
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Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474361
File:
PDF, 572 KB
english, 2013
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