[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes
Lin, Chih-Ming, Chen, Yung-Yu, Felmetsge, Valery V., Senesky, Debbie G., Pisano, Albert P.Year:
2013
Language:
english
DOI:
10.1109/MEMSYS.2013.6474361
File:
PDF, 572 KB
english, 2013