Measurement and control of absolute nitrogen atom density...

Journal of Applied Physics 2000 Vol. 88; Iss. 4

Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy

Tada, Shigekazu, Takashima, Seigou, Ito, Masafumi, Hori, Masaru, Goto, Toshio, Sakamoto, Yuichi
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Volume:
88
Year:
2000
Language:
english
DOI:
10.1063/1.1305559
File:
PDF, 458 KB
english, 2000
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