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Some properties of crystallized tantalum pentoxide thin films on silicon
Oehrlein, G. S., d’Heurle, F. M., Reisman, A.Volume:
55
Year:
1984
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332924
File:
PDF, 1.20 MB
english, 1984