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[IEEE International Electron Devices and Materials Symposium - Hsinchu, Taiwan (12-15 July, 1994)] International Electron Devices and Materials Symposium - The study of silicon pressure sensors fabrication
Chung-Cheng Chang,, Chi-Tsai Liu,, Mei-Kuan Hsich,Year:
1994
Language:
english
DOI:
10.1109/EDMS.1994.771220
File:
PDF, 395 KB
english, 1994