Mechanisms of thermal stress relaxation and stress-induced...

Journal of Applied Physics 1991 Vol. 69; Iss. 12

Mechanisms of thermal stress relaxation and stress-induced voiding in narrow aluminum-based metallizations

Korhonen, M. A., Paszkiet, C. A., Li, Che-Yu
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Volume:
69
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.347457
File:
PDF, 1.45 MB
english, 1991
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