How slender can comb-drive fingers be?

Journal of Micromechanics and Microengineering 2005 / 05 Vol. 15; Iss. 5

How slender can comb-drive fingers be?

Elata, David, Leus, Vitaly
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/5/023
Date:
May, 2005
File:
PDF, 121 KB
english, 2005
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