High-resolution laser lithography system based on...

Review of Scientific Instruments 2009 Vol. 80; Iss. 8

High-resolution laser lithography system based on two-dimensional acousto-optic deflection

Koechlin, Manuel, Poberaj, Gorazd, Günter, Peter
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Volume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3202274
File:
PDF, 712 KB
english, 2009
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