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SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Miniaturized Systems with Micro-Optics and Micromechanics - Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process
Bright, Victor M., Comtois, John H., Sene, Darren E., Reid, J. Robert, Gustafson, Steven C., Watson, Edward A., Motamedi, M. EdwardVolume:
2687
Year:
1996
Language:
english
DOI:
10.1117/12.234634
File:
PDF, 2.17 MB
english, 1996