Hard amorphous carbon–fluorine films deposited by PECVD...

Diamond and Related Materials 2003 / 10 Vol. 12; Iss. 10-11

Hard amorphous carbon–fluorine films deposited by PECVD using C2H2–CF4 gas mixtures as precursor atmospheres

Jacobsohn, L.G., Maia da Costa, M.E.H., Trava-Airoldi, V.J., Freire, F.L.
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00200-0
Date:
October, 2003
File:
PDF, 100 KB
english, 2003
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