Sputtering from energetic self-ion cascades

Sputtering from energetic self-ion cascades

K.L. Merkle, P.P. Pronko
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Volume:
53
Year:
1974
Language:
english
Pages:
7
DOI:
10.1016/0022-3115(74)90249-9
File:
PDF, 722 KB
english, 1974
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