Modeling in-plane misalignments in lateral combdrive transducers
Avdeev, Ilya V, Lovell, Michael R, Onipede, DipoVolume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/6/303
Date:
November, 2003
File:
PDF, 266 KB
english, 2003