An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive
Liao, Yunn-Shiuan, Chyuan, Shiang-Woei, Chen, Jeng-TzongVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/8/020
Date:
August, 2004
File:
PDF, 705 KB
english, 2004