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Observation of bulk HfO[sub 2] defects by spectroscopic ellipsometry
Takeuchi, Hideki, Ha, Daewon, King, Tsu-JaeVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705593
File:
PDF, 484 KB
english, 2004