Advanced chemical deposition techniques - from research to...

Integrated Ferroelectrics 2001 / 01 Vol. 36; Iss. 1-4

Advanced chemical deposition techniques - from research to production

Waser, Rainer, Schneller, Theo, Hoffmann-eifert, Susanne, Ehrhart, Peter
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Volume:
36
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108015524
Date:
January, 2001
File:
PDF, 2.17 MB
english, 2001
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